nostr:npub1rfpj3vjstumszudl70fft8zmcnyy8q2ghkd73hgzc4ywyp35uclq5epprs nostr:npub1r89lejecvj7q25pqsf9ed63exe3rp3cezdkudk0fr7dwklde6gsqvqs5dt 
Excel, and the data sources I listed in the subtitle.  I interpolated through the gaps in data, and cut it off at 1900.  Oh I also used population data from the Penn Libraries statistics to calculate the rates for the older data.
It's not that great, but I originally made it just for myself...